Development of neutron supermirror with large-scale ion-beam sputtering instrument

Maruyama, Ryuji; Yamazaki, Dai; Ebisawa, Toru*; Hino, Masahiro*; Soyama, Kazuhiko

Physica B; Condensed Matter, 385-386(2), p.1256 - 1258, 2006/11

https://doi.org/10.1016/j.physb.2006.06.024

Neutron supermirror has become an important device to transport, bending and focusing a neutron beam. We have developed it using ion beam sputtering (IBS) instrument since it enables us to produce good quality layers with high density and small grain size. We have also investigated ion-polishing technique, which suppresses the interface roughness of multilayers. We have now installed new IBS instrument with effective deposit area of 500 mm in diameter for the realization of supermirror guide and bender with large effective critical angle. In this presentation, the performance of the supermirrors fabricated with it and the future development of neutron optical devices using supermirrors will be discussed.

Fabrication and characterization of NiC/Ti multilayer supermirror deposited using ion beam sputtering

Soyama, Kazuhiko; ; Ebisawa, Toru*

JAERI-Research 98-067, 61 Pages, 1998/10

JAERI-Research-98-067.pdf:6.88MB

no abstracts in English